Failure mechanism and reliability study of domestic stacked capacitor processes

WANG Shuo, WANG Jing, JU An'an, ZHAO Rong, KONG Zebin

Integrated Circuits and Embedded Systems ›› 2025, Vol. 25 ›› Issue (1) : 29-33.

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Integrated Circuits and Embedded Systems ›› 2025, Vol. 25 ›› Issue (1) : 29-33. DOI: 10.20193/j.ices2097-4191.2024.0067
Special Topic of Aerospace Component Reliability

Failure mechanism and reliability study of domestic stacked capacitor processes

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2025, 25(1): 29-33 https://doi.org/10.20193/j.ices2097-4191.2024.0067

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