基于单光子雪崩二极管的成像技术综述

王哲; 田娜; 杨旭; 冯鹏; 窦润江; 于双铭; 刘剑; 吴南健; 刘力源

doi:10.20193/j.ices2097-4191.2024.05.002

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集成电路与嵌入式系统 ›› 2024, Vol. 24 ›› Issue (5) : 10-25. DOI: 10.20193/j.ices2097-4191.2024.05.002

CMOS图像传感器研究专栏

基于单光子雪崩二极管的成像技术综述

王哲 ¹^,² ,
田娜 ¹^,² ,
杨旭 ¹^,² ,
冯鹏 ¹^,² ,
窦润江 ¹^,² ,
于双铭 ¹^,² ,
刘剑 ¹^,² ,
吴南健 ¹^,² ,
刘力源 ¹^,³^,^*

作者信息 +

¹ 中国科学院半导体研究所半导体超晶格国家重点实验室,北京 100083

² 中国科学院大学材料科学与光电技术学院,北京 100049

³ 中国科学院大学电子电气与通信工程学院,北京 100049

作者简介:

王哲(助理研究员),主要研究方向为基于单光子雪崩二极管的图像传感器及数模混合大规模集成电路设计;

田娜(博士研究生),主要研究方向为三维TOF图像传感器设计;

杨旭(助理研究员),主要研究方向为面向单光子成像技术的图像处理算法和处理器设计;

冯鹏(副研究员,硕士生导师),主要研究方向为CMOS图像传感器和物联网传感芯片;

窦润江(高级工程师),主要研究方向为人工智能视觉芯片和智能视觉系统;

于双铭(副研究员,硕士生导师),主要研究方向为低功耗数模混合集成电路和智能视觉处理器;

刘剑(研究员,博士生导师),主要研究方向为CMOS太赫兹探测与成像、太赫兹超材料及器件和微纳米结构制作工艺;

吴南健(研究员,博士生导师),主要研究方向为仿生视觉片上系统芯片、神经网络图像并行处理芯片、高速图像传感器和极低功耗模拟集成电路芯片设计和应用;

刘力源(研究员,博士生导师),主要研究方向为人工智能视觉芯片,包括人工视觉感知器件和电路、新型视觉传感器、边缘视觉处理器、传感器/处理器集成技术等。

通信作者:

* E-mail:liuly@semi.ac.cn。

折叠

Overview of imaging technology based on single photon avalanche diode

WANG Zhe ¹^,² ,
TIAN Na ¹^,² ,
YANG Xu ¹^,² ,
FENG Peng ¹^,² ,
DOU Runjiang ¹^,² ,
YU Shuangming ¹^,² ,
LIU Jian ¹^,² ,
WU Nanjian ¹^,² ,
LIU Liyua ¹^,³^,^*

Author information +

文章历史 +

摘要

单光子成像技术涉及半导体工艺、光电器件以及集成电路设计等多个方面,基于单光子雪崩二极管的成像技术具有高动态二维灰度成像、高精度三维成像和荧光寿命成像能力,在安防监控、自动驾驶和生物医疗等领域具有广阔的应用前景。伴随着半导体工艺技术的飞速发展,单光子成像技术有望成为应用广泛的下一代视觉感知技术。本文对基于单光子雪崩二极管的成像技术进行了系统的介绍,包括单光子雪崩二极管器件、单光子成像涉及的关键电路以及二维灰度和时间分辨单光子图像传感器的最新研究进展。

Abstract

Single-photon imaging technology involves multiple aspects such as semiconductor processes,optoelectronic devices,and integrated circuit design.Based on single-photon avalanche diodes,single-photon imaging technology offers high dynamic two-dimensional grayscale imaging,high-precision three-dimensional imaging,and fluorescence lifetime imaging capabilities.It has significant application prospects in fields such as security surveillance,autonomous driving,and biomedicine.With the rapid development of semiconductor process technology,single-photon imaging technology is expected to become a widely used next-generation visual perception technology.This article provides a systematic introduction to imaging technology based on single-photon avalanche diodes,including the device structure of single-photon avalanche diodes,key circuits involved in single-photon imaging,and the latest research progress in gray scale and temporal resolution single-photon image sensors.

导出引用

王哲, 田娜, 杨旭, 等. 基于单光子雪崩二极管的成像技术综述[J]. 集成电路与嵌入式系统. 2024, 24(5): 10-25 https://doi.org/10.20193/j.ices2097-4191.2024.05.002

WANG Zhe, TIAN Na, YANG Xu, et al. Overview of imaging technology based on single photon avalanche diode[J]. Integrated Circuits and Embedded Systems. 2024, 24(5): 10-25 https://doi.org/10.20193/j.ices2097-4191.2024.05.002

中图分类号： TN4 (微电子学、集成电路(IC))

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