基于二维半导体的图像传感器

于雅俐, 麦梓锋, 刘力源, 魏钟鸣, 慈鹏弘

集成电路与嵌入式系统 ›› 2024, Vol. 24 ›› Issue (5) : 26-34.

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集成电路与嵌入式系统 ›› 2024, Vol. 24 ›› Issue (5) : 26-34. DOI: 10.20193/j.ices2097-4191.2024.05.003
CMOS图像传感器研究专栏

基于二维半导体的图像传感器

作者信息 +

Image sensors based on two-dimensional semiconductors

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摘要

图像传感器作为获取视觉信息的重要器件,可将感知到的光信号转换为电信号进行输出。目前,基于互补型金属氧化物半导体构建的图像传感器制造技术已相当成熟。然而,在某些特定的应用场景下,对微型化和多功能的图像传感器的需求仍待解决。面对此挑战,结合二维半导体丰富的材料体系及优异的光电特性,以及器件向微型化和多功能化发展的趋势,基于二维半导体的图像传感器在微型化和高集成度方面显示出巨大潜力,为图像传感器领域的发展带来了新机遇。本文首先介绍了二维半导体的带隙特性及其对应的光谱响应波段范围,展示了基于二维半导体的单像素成像技术;接着,阐述了如何利用二维半导体原子排布呈面内各向异性的特征,成功构筑了偏振敏感的图像传感器;最后,探讨了随着大面积二维半导体材料生长技术的不断成熟,如何进一步实现基于二维半导体像素阵列图像传感器的构筑。

Abstract

Image sensors,as crucial devices for capturing visual information,convert perceived light signals into electrical outputs.Currently,the manufacturing technology for image sensors based on complementary metal-oxide-semiconductor is quite mature.However,there is still a demand for miniaturized and multifunctional image sensors in certain specific application scenarios.Facing this challenge,image sensors based on two-dimensional (2D) semiconductors,with their rich material systems and excellent photoelectric properties,demonstrate potential in miniaturization and high integration,offering new opportunities for the development of the image sensor field.This paper first discusses the bandgap characteristics of 2D semiconductors and their corresponding spectral response ranges,showcasing single-pixel imaging technology based on 2D semiconductors.It then describes how the in-plane anisotropic properties of atomic arrangements in 2D semiconductors are utilized to successfully construct polarization-sensitive image sensors.Finally,it explores how the ongoing maturation of large-area growth technologies for 2D semiconductor materials can further facilitate the construction of image sensor arrays based on 2D semiconductors.

关键词

二维半导体 / 光响应 / 偏振敏感 / 单像素 / 阵列像素 / 图像传感器

Key words

two-dimensional semiconductors / photoresponse / polarization-sensitive / single-pixel / array-pixel / image sensors

引用本文

导出引用
于雅俐, 麦梓锋, 刘力源, . 基于二维半导体的图像传感器[J]. 集成电路与嵌入式系统. 2024, 24(5): 26-34 https://doi.org/10.20193/j.ices2097-4191.2024.05.003
YU Yali, MAI Zifeng, LIU Liyuan, et al. Image sensors based on two-dimensional semiconductors[J]. Integrated Circuits and Embedded Systems. 2024, 24(5): 26-34 https://doi.org/10.20193/j.ices2097-4191.2024.05.003
中图分类号: TP872 (远距离控制和信号、远距离控制和信号系统)   

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