基于JIT精益生产的半导体设备调度系统设计
刘伽利, 许佳, 张晔, 李智炜, 于红旗, 刘海军
Design of semiconductor equipment scheduling system based on JIT lean production
LIU Jiali, XU Jia, ZHANG Ye, LI Zhiwei, YU Hongqi, LIU Haijun
集成电路与嵌入式系统
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2026, (3): 7
-19
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DOI: 10.20193/j.ices2097-4191.2025.0119
