Voltage enhancement and optimization of super junction MOS devices based on deep trench single epitaxial process

TIAN Jun, FU Zhen, ZHANG Quan, XIAO Chao, ZHANG Wenmin, WANG Yue

Integrated Circuits and Embedded Systems ›› 2024, Vol. 24 ›› Issue (6) : 46-54.

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Integrated Circuits and Embedded Systems ›› 2024, Vol. 24 ›› Issue (6) : 46-54.
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Voltage enhancement and optimization of super junction MOS devices based on deep trench single epitaxial process

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2024, 24(6): 46-54

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