Design of semiconductor equipment scheduling system based on JIT lean production
LIU Jiali, XU Jia, ZHANG Ye, LI Zhiwei, YU Hongqi, LIU Haijun
Integrated Circuits and Embedded Systems . 2026, (3): 7 -19 .  DOI: 10.20193/j.ices2097-4191.2025.0119